APPLICATION
Thin-film Measurement
★ Ellipsometer ★
◆ DualSpectrometer (DS) : Can be combined with various UV / VIS + NIR spectrometers
DS series spectrometer is integrated two different linear sensor and Y-splitter optical fiber. The optical engine is very simple and rigid. The spectral responded range of DS Series is wide and can be customized by customer’s need, from UV to NIR (180-1700nm).
◆ Algorithms of Stray Light Calibration (SC)
OtO has a very powerful stray light calibration (SC) capability because of our strong expertise in optical design and software engineering. Level of stray light has been decreased to only 0.01% after our software stray light calibration. In case of the measurement needs for low transmittance, low reflectance, high absorbance, weak light source and extremely short integration time, the calibration will work well. There is no need to spend any calculation time when measuring.
The great contribution to low transmittance
| Standard values of transmittance | Measured values before SC | Measured values after SC | |
|---|---|---|---|
| Stray Light Level: 0.12% | Stray Light Level: 0.05% | Stray Light Level: 0.01% | |
| 90.00% | 90.01% | 90.00% | 90.00% |
| 10.00% | 10.11% | 10.04% | 10.01% |
| 1.00% | 1.12% | 1.05% | 1.01% |
| 0.10% | 0.22% | 0.15% | 0.11% |
◆ Recommended Models :
| Application | Model Name | Wavelength Range (nm) | Slit (um) | Resolution | SNR | Exposure Time (ms) | Dynamic Range | Thermal Stability |
| Film Thickness Measurement | SE-3/ SE-9 | 180- 1100 | 50 | 3.2 nm | 330/ 500 | 0.2/1.5 | 3000/ 3120 | 0.039 nm/℃ |
| HB-3/ HB-6/ HB-9 | 180- 1100 | 50 | 3.4 nm | 330 | 0.21-10 | 3120/ 7370/ 2200 | 0.01 nm/℃ |